Metal-gated MOSFET devices having scaled gate stack thickness including gettering species in a buried oxide

ABSTRACT

Metal-oxide semiconductor field effect transistor (MOSFET) devices having metal gate stacks and techniques for improving performance thereof are provided. In one aspect, a metal-oxide semiconductor device is provided comprising a substrate having a buried oxide layer at least a portion of which is configured to serve as a primary background oxygen getterer of the device; and a gate stack separated from the substrate by an interfacial oxide layer. The gate stack comprises a high-K layer over the interfacial oxide layer; and a metal gate layer over the high-K layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 11/931,033filed on Oct. 31, 2007, now U.S. Pat. No. 7,648,868, the contents ofwhich are incorporated by reference herein.

FIELD OF THE INVENTION

The present invention relates to metal-oxide semiconductor field effecttransistor (MOSFET) devices, and more particularly, to metal-gatedMOSFET devices and techniques for scaling metal gate stack thickness soas to improve device performance.

BACKGROUND OF THE INVENTION

Metal-oxide semiconductor field effect transistor (MOSFET) devices areused in many integrated circuit designs, serving as switches to open andclose the circuits. In general, a MOSFET device comprises a sourceregion and a drain region connected by a channel, and a gate stackseparated from the channel by a gate dielectric. The channel cancomprise an n-type or p-type semiconductor material, forming ann-channel MOSFET (NMOSFET) or a p-channel MOSFET (PMOSFET) device,respectively.

Traditionally, the gate stack in a MOSFET device would comprise asemiconductor material, such as silicon, over a nitride-containinglayer, which serves as the gate dielectric. Current research, however,is focused on the development of metal-gated MOSFET devices, e.g.,MOSFET devices wherein the gate stack comprises a metal gate layer overa high-K layer, which serves as the gate dielectric. The use ofmetal-gated MOSFET devices is favorable for complementary metal-oxidesemiconductor (CMOS) technology scaling. As such, with the current needfor transistors having smaller feature sizes, improved metal-gatedMOSFET devices are in demand.

To implement a metal gate stack in a MOSFET device, an interfacial oxideregion is typically incorporated between the gate stack and the channel.However, regrowth of the interfacial oxide region, e.g., duringfabrication of the device, can negatively affect device performance, asit increases the effective oxide thickness (EOT) and degrades the shortchannel and scaling benefits of the metal gate.

Typically, with metal-gated MOSFET devices, regrowth of the interfacialoxide region is prevented by amorphous silicon (Si) or poly-silicon(poly-Si) present in the gate stack over the metal gate layer whichserves to attract background oxygen, and thereby prevents regrowth ofthe interfacial oxide region. However, to be effective at preventingregrowth the amorphous Si or poly-Si has to be located in closeproximity to the interfacial oxide region. Since the metal gate layer ispresent in the gate stack between the amorphous Si/poly-Si and theinterfacial oxide region, the thickness of the metal gate layer islimited, typically to about 10 nanometers. Having a thicker metal gatelayer places the interfacial oxide region too far away from theamorphous Si/poly-Si and thus leads to regrowth of the interfacial oxideregion. Having this thickness limitation is disadvantageous becauseincreasing the thickness of the metal gate layer can enhance deviceperformance.

Therefore, techniques that permit the metal gate layer thickness to beincreased, and thus enhancing device performance, without causingregrowth at the interfacial oxide region would be desirable.

SUMMARY OF THE INVENTION

The present invention provides metal-oxide semiconductor field effecttransistor (MOSFET) devices having metal gate stacks and techniques forimproving performance thereof. In one aspect of the invention, ametal-oxide semiconductor device is provided comprising a substratehaving a buried oxide layer at least a portion of which is configured toserve as a primary background oxygen getterer of the device; and a gatestack separated from the substrate by an interfacial oxide layer. Thegate stack comprises a high-K layer over the interfacial oxide layer;and a metal gate layer over the high-K layer.

In another aspect of the invention, a method for fabricating ametal-oxide semiconductor device is provided. The method comprises thefollowing steps. A wafer is provided having a buried oxide layer betweena first semiconductor layer and a second semiconductor layer. One ormore oxygen getterer species are implanted into at least a portion ofthe buried oxide layer. A well region is formed in the firstsemiconductor layer. An interfacial oxide layer is formed over the wellregion. A gate stack is formed over the interfacial oxide layer. A firstraised source/drain region and a second raised source/drain region areformed adjacent to opposite sides of the gate stack. A firstsource/drain extension region is formed that extends the first raisedsource/drain region to the well region and a second source/drainextension region is formed that extends the second raised source/drainregion to the well region.

A more complete understanding of the present invention, as well asfurther features and advantages of the present invention, will beobtained by reference to the following detailed description anddrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional diagram illustrating an exemplarymetal-oxide semiconductor field effect transistor (MOSFET) deviceaccording to an embodiment of the present invention;

FIG. 2 is a cross-sectional diagram illustrating another exemplaryMOSFET device according to an embodiment of the present invention;

FIG. 3 is a cross-sectional diagram illustrating yet another exemplaryMOSFET device according to an embodiment of the present invention; and

FIGS. 4A-M are cross-sectional diagrams illustrating an exemplarymethodology for fabricating a MOSFET device according to an embodimentof the present invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

FIG. 1 is a cross-sectional diagram illustrating exemplary metal-oxidesemiconductor field effect transistor (MOSFET) device 100. According toan exemplary embodiment, MOSFET device 100 is either an n-channel MOSFET(NMOSFET) (abbreviated hereinafter as “NFET”) device or a p-channelMOSFET (PMOSFET) (abbreviated hereinafter as “PFET”) device. MOSFETdevice 100 comprises substrate 102 having shallow trench isolation (STI)regions 108/110 and source/drain regions 112/114 formed therein, gatestack 116 separated from substrate 102 by interfacial oxide layer 138and nitride spacers 118/offset spacers 120/source/drain diffusionspacers 121 adjacent to gate stack 116.

Substrate 102 comprises a silicon-on-insulator (SOI) substrate. As willbe described in detail below, substrate 102 is formed from a thin SOIwafer, such as an ultra-thin SOI (UTSOI) wafer or an extra-thin SOI(ETSOI) wafer having a buried oxide (BOX) layer present between twosemiconductor layers. According to an exemplary embodiment, each of thesemiconductor layers comprises silicon (Si). In general, UTSOI waferscomprise a silicon layer over an insulator (e.g., a BOX layer), whereinthe silicon layer (also referred to herein as a “device layer”) has athickness of between about 13 nanometers (nm) and about 20 nm, and ETSOIwafers comprise a silicon layer over an insulator (e.g., a BOX layer),wherein the silicon layer (also referred to herein as a “device layer”)has a thickness of between about seven nm and about 10 nm.

The BOX layer forms BOX layer 103 in substrate 102. According to thepresent teachings, at least a portion of BOX layer 103 is configured toact as a primary background oxygen getterer of the device, i.e., toattract any background oxygen present. Namely, at least a portion of BOXlayer 103 is configured to be Si-rich and/or is implanted with an oxygengetterer species, such as one or more of arsenic (As) and boron (B).According to the exemplary embodiment shown in FIG. 1, BOX layer 103 isconfigured, in its entirety, to be Si-rich, with an oxygen gettererspecies implanted into region 106. Variations on this embodiment are,however, possible. For example, BOX layer 103 can, in its entirety, beeither configured to be Si-rich or implanted with an oxygen gettererspecies.

As the primary background oxygen getterer, BOX layer 103 serves toprevent regrowth of interfacial oxide layer 138 that separates gatestack 116 from substrate 102. The regrowth of the interfacial oxidelayer and its effect on device performance will be described in detailbelow. The term “primary background oxygen getterer,” as used herein,refers to the ability of, i.e., BOX layer 103, to serve as the main, andin some instances the only background oxygen getterer of the device. Assuch, other background oxygen getterer(s) may, or may not be, present inthe device. For example, in some embodiments herein, a silicon layer ispresent in the gate stack and can serve, at least to some extent, as abackground oxygen getterer.

Source/drain region 112 comprises a source/drain extension region 122that is continuous with a raised source/drain region 124 (havingsilicide region 126 formed on a top surface thereof). Each ofsource/drain extension region 122 and raised source/drain region 124 aredoped. Suitable dopants will vary depending on whether MOSFET device 100is an NFET or a PFET device. By way of example only, when MOSFET device100 is an NFET device, suitable dopants for each of source/drainextension region 122 and raised source/drain region 124 include, but arenot limited to, one or more of As, phosphorous (P) and antimony (Sb).When MOSFET device 100 is a PFET device, suitable dopants for each ofsource/drain extension region 122 and raised source/drain region 124include, but are not limited to, one or more of B and borondifluoride(BF₂). Source/drain region 114 comprises a source/drain extension region128 that is continuous with a raised source/drain region 130 (havingsilicide region 132 formed on a top surface thereof). As above, whenMOSFET device 100 is an NFET device, suitable dopants for each ofsource/drain extension region 128 and raised source/drain region 130include, but are not limited to, one or more of As, P and Sb. WhenMOSFET device 100 is a PFET device, suitable dopants for each ofsource/drain extension region 128 and raised source/drain region 130include, but are not limited to, one or more of B and BF₂.

Well region 134 is present between source/drain region 112 andsource/drain region 114. Well region 134 serves as a channel of thedevice. According to an exemplary embodiment, MOSFET device 100 iseither an NFET or a PFET device and well region 134 comprises either ap-well implant (such as one or more of B, BF₂ and indium (In)) or ann-well implant (such as one or more of As, P and Sb), respectively. Ahalo region 136 is present on either side of well region 134. Ingeneral, halo regions are present in most complementary metal-oxidesemiconductor (CMOS) devices at 0.25 micrometers (μm) and under, as thehalo regions provide an increase in effective channel doping as thechannel length is decreased (i.e., halo regions help in suppressingshort channel effects). When MOSFET device 100 is an NFET device, haloregions 136 can comprise one or more of B and BF₂. When MOSFET device100 is a PFET device, halo regions 136 can comprise one or more of As, Pand Sb.

Gate stack 116 comprises high-K layer 140, metal gate layer 142 overhigh-K layer 140 and silicon layer 144 over a side of metal gate layer142 opposite high-K layer 140. High-K layer 140 can comprise one or moreof hafnium oxide (HfO₂), tantalum oxide (Ta₂O₅), titanium oxide (TiO₂),aluminum oxide (Al₂O₃) and lanthanum oxide (La₂O₅). Metal gate layer 142can comprise one or more of tantalum (Ta), tantalum nitride (TaN),tantalum carbide nitride (TaCN), tantalum silicon nitride (TaSiN),tantalum silicide (TaSi), aluminum nitride (AlN), tungsten (W) andmolybdenum (Mo). Silicon layer 144 can comprise one or more of amorphousSi or poly-silicon (poly-Si). Silicon layer 144 can be doped. WhenMOSFET device 100 comprises an NFET device, silicon layer 144 can bedoped with one or more of As, P and Sb. When MOSFET device 100 comprisesa PFET device, silicon layer 144 can be doped with one or more of B andBF₂. Silicon layer 144 has silicide region 146 formed thereon.

According to an exemplary embodiment, metal gate layer 142 has athickness of about 10 nm, and silicon layer 144 has a thickness ofbetween about 40 nm and about 90 nm. The thickness of the metal gatelayer can be varied, for example, to enhance performance of the device.See, for example, FIGS. 2 and 3 (described below).

As highlighted above, interfacial oxide layer 138 separates gate stack116 from substrate 102. According to an exemplary embodiment,interfacial oxide layer 138 comprises silicon dioxide (SiO₂). Duringfabrication of MOSFET device 100, as will be described in detail below,the interfacial oxide layer is grown over the substrate during theformation of the gate stack. Later in the fabrication process, however,if background oxygen from adjacent spacers and other CMOS processesreaches the interfacial oxide layer, e.g., during high temperaturesequences (such as during the final activation anneal), regrowth of theinterfacial oxide layer can occur. Regrowth of the interfacial oxidelayer is unfavorable as it increases the effective oxide thickness (EOT)and degrades the short channel and scaling benefits of using a metalgate stack.

One technique that has been used in some devices to prevent regrowth ofthe interfacial oxide layer is to encapsulate the device in a diffusionbarrier. For example, a nitride can be used as a diffusion barrier inthe device. The effectiveness of this technique is dependent upon thenitride characteristics. Also, a nitride will contribute to an elevatedout fringe capacitance in metal-gated devices. Even with a nitridebarrier, the diffusion barrier is not strong enough to enable increasingthe metal thickness (which, as described below, can enhance deviceperformance) without regrowth of the interfacial oxide layer occurring.

The present techniques solve this problem by using the BOX layer as theprimary background oxygen getterer of the device. According to thepresent teachings, the BOX layer is located closer to the interfacialoxide layer than in conventional devices. Namely, as described above,the present MOSFET device comprises an UTSOI or ETSOI substrate. Witheither substrate configuration (UTSOI or ETSOI) the BOX layer is closerto the gate stack. Namely, in conventional devices utilizing SOIsubstrates, the silicon layer over the insulator, i.e., the devicelayer, has a thickness of about 70 nm. By comparison, as describedabove, with an UTSOI or ETSOI the silicon layer over the insulator,i.e., the device layer, is at most about 20 nm thick. As such, in thepresent teachings, the thickness of the silicon layer separating the BOXlayer from the gate stack is less than in conventional devices. Further,since the BOX layer is present below the interfacial oxide layer, thethickness of the metal gate layer does not affect the distance betweenthe BOX layer and the interfacial oxide layer, and thus will not impactthe effectiveness of the BOX layer in preventing regrowth of theinterfacial oxide layer.

Advantageously, it has been discovered by way of the present techniquesthat increasing the thickness of the metal gate layer can enhanceperformance of the device. For example, the metal gate layer can begrown as a stressed film, thereby imparting favorable stress on thedevice and improving device performance (e.g., both direct current (DC)performance through stressed metals and alternating current (AC)performance due to a superior resistive capacitive (RC) delay in metal,i.e., versus conventional silicide/doped poly-Si gate lines).Additionally, it may be possible to relax the sidewall diffusion barriernitride requirement, i.e., it may be possible to scale down thethickness of the nitride diffusion barrier (see above) and/or toeliminate the nitride diffusion barrier altogether, and thereby improvethe outer fringe parasitic capacitance (Cof). Growing the metal gatelayer as a stressed film produces a metal gate layer with a thicknessthat is greater than what can generally be supported by conventionaldevice designs (see description above). However, since the presenttechniques do not have these restraints on the metal gate layerthickness, the metal gate layer can be grown as a stressed film.

As shown in FIG. 1, nitride spacers 118 are present adjacent to gatestack 116 and offset spacers 120 are present between nitride spacers 118and source/drain diffusion spacers 121. According to an exemplaryembodiment, offset spacers 120 comprise oxide spacers and source/draindiffusion spacers 121 comprise nitride spacers. Nitride spacers 118 andoffset spacers 120 are configured to have a combined thickness to setproper overlap capacitance for rapid thermal annealing(RTA)-source/drain extension flow. Namely, as will be described indetail below, source/drain extension implants will be made after nitridespacers 118 and offset spacers 120 are present. Therefore, the implantedprofile is aligned to nitride spacers 118/offset spacers 120. In thecompleted device, the source/drain extension implants are typicallyrequired to diffuse at least about five nm into the channel. Therefore,if each of nitride spacers 118 has a thickness of about three nm andeach of offset spacers 120 has a thickness of about 14 nm, then duringthe final anneal (described below) the source/drain extension implantswould need to be diffused a total distance of about 22 nm (i.e., thecombined thicknesses of the spacers plus the five nm depth into thechannel). If the spacer dimensions are reduced then the source/drainextension implant dose may be reduced and/or the duration of the finalanneal can be reduced, accordingly.

FIG. 2 is a cross-sectional diagram illustrating exemplary MOSFET device200. According to an exemplary embodiment, MOSFET device 200 is eitheran NFET device or a PFET device. MOSFET device 200 comprises substrate202 having STI regions 208/210 and source/drain regions 212/214 formedtherein, gate stack 216 separated from substrate 202 by interfacialoxide layer 238 and nitride spacers 218/offset spacers 220/source/draindiffusion spacers 221 adjacent to gate stack 216.

Substrate 202 comprises a SOI substrate. As will be described in detailbelow, substrate 202 is formed from a thin SOI wafer, such as an UTSOIwafer or an ETSOI wafer having a BOX layer present between twosemiconductor layers. According to an exemplary embodiment, each of thesemiconductor layers comprises Si.

The BOX layer forms BOX layer 203 in substrate 202. According to thepresent teachings, at least a portion of BOX layer 203 is configured toact as a primary background oxygen getterer of the device, i.e., toattract any background oxygen present. Namely, at least a portion of BOXlayer 203 is configured to be Si-rich and/or is implanted with an oxygengetterer species, such as one or more of As and B. According to theexemplary embodiment shown in FIG. 2, BOX layer 203 is configured, inits entirety, to be Si-rich, with an oxygen getterer species implantedinto region 206.

As the primary background oxygen getterer, BOX layer 203 serves toprevent regrowth of interfacial oxide layer 238 that separates gatestack 216 from substrate 202. The regrowth of the interfacial oxidelayer and its effect on device performance were described above.

Source/drain region 212 comprises a source/drain extension region 222that is continuous with a raised source/drain region 224 (havingsilicide region 226 formed on a top surface thereof). Each ofsource/drain extension region 222 and raised source/drain region 224 aredoped. Suitable dopants will vary depending on whether MOSFET device 200is an NFET or a PFET device. By way of example only, when MOSFET device200 is an NFET device, suitable dopants for each of source/drainextension region 222 and raised source/drain region 224 include, but arenot limited to, one or more of As, P and Sb. When MOSFET device 200 is aPFET device, suitable dopants for each of source/drain extension region222 and raised source/drain region 224 include, but are not limited to,one or more of B and BF₂. Source/drain region 214 comprises asource/drain extension region 228 that is continuous with a raisedsource/drain region 230 (having silicide region 232 formed on a topsurface thereof). As above, when MOSFET device 200 is an NFET device,suitable dopants for each of source/drain extension region 228 andraised source/drain region 230 include, but are not limited to, one ormore of As, P and Sb. When MOSFET device 200 is a PFET device, suitabledopants for each of source/drain extension region 228 and raisedsource/drain region 230 include, but are not limited to, one or more ofB and BF₂.

Well region 234 is present between source/drain region 212 andsource/drain region 214. Well region 234 serves as a channel of thedevice. According to an exemplary embodiment, MOSFET device 200 iseither an NFET or a PFET device and well region 234 comprises either ap-well implant (such as one or more of B, BF₂ and In) or a n-wellimplant (such as one or more of As, P and Sb), respectively. A haloregion 236 is present on either side of well region 234. When MOSFETdevice 200 is an NFET device, halo regions 236 can comprise one or moreof B and BF₂. When MOSFET device 200 is a PFET device, halo regions 236can comprise one or more of As, P and Sb.

Gate stack 216 comprises high-K layer 240, metal gate layer 242 overhigh-K layer 240 and silicon layer 244 over a side of metal gate layer242 opposite high-K layer 240. High-K layer 240 can comprise one or moreof HfO₂, Ta₂O₅, TiO₂, Al₂O₃ and La₂O₅. Metal gate layer 242 can compriseone or more of Ta, TaN, TaCN, TaSiN, TaSi, AlN, W and Mo. Silicon layer244 can comprise one or more of amorphous Si or poly-Si. Silicon layer244 can be doped. When MOSFET device 200 comprises an NFET device,silicon layer 244 can be doped with one or more of As, P and Sb. WhenMOSFET device 200 comprises a PFET device, silicon layer 244 can bedoped with one or more of B and BF₂. Silicon layer 244 has silicideregion 246 formed thereon.

Metal gate layer 242 has a thickness that is greater than a thickness ofmetal gate layer 142, described, for example, in conjunction with thedescription of FIG. 1, above. According to an exemplary embodiment,metal gate layer 242 has a thickness of between about 20 nm and about 50nm, and silicon layer 244 has a thickness of between about 50 nm andabout 80 nm. As described above, the thickness of the metal gate layercan be varied to enhance performance of the device. As shown in FIG. 2,the thickness of the metal gate layer is increased to impart favorablestress to the device. Stress scales almost linearly with the metal gatelayer thickness. For a metal gate layer that is about 10 nm thick, thestress levels can enhance MOSFET device drive current by around fivepercent (%). Therefore, by way of example only, a metal gate layerhaving a thickness of between about 30 and about 70 nm could correlateto between about a 15% and about a 35% increase in MOSFET deviceperformance.

As highlighted above, interfacial oxide layer 238 separates gate stack216 from substrate 202. According to an exemplary embodiment,interfacial oxide layer 238 comprises SiO₂. As above, BOX layer 203 isconfigured to prevent regrowth of interfacial oxide layer 238, and assuch is located closer to interfacial oxide layer 238 than inconventional devices.

As shown in FIG. 2, nitride spacers 218 are present adjacent to gatestack 216 and offset spacers 220 are present between nitride spacers 218and source/drain diffusion spacers 221. According to an exemplaryembodiment, offset spacers 220 comprise oxide spacers and source/draindiffusion spacers 221 comprise nitride spacers. Nitride spacers 218 andoffset spacers 220 are configured to have a combined thickness to setproper overlap capacitance for RTA-source/drain extension flow (seeabove description).

FIG. 3 is a cross-sectional diagram illustrating exemplary MOSFET device300. According to an exemplary embodiment, MOSFET device 300 is eitheran NFET device or a PFET device. MOSFET device 300 comprises substrate302 having STI regions 308/310 and source/drain regions 312/314 formedtherein, gate stack 316 separated from substrate 302 by interfacialoxide layer 338 and nitride spacers 318/offset spacers 320/source/draindiffusion spacers 321 adjacent to gate stack 316.

Substrate 302 comprises a SOI substrate. As will be described in detailbelow, substrate 302 is formed from a thin SOI wafer, such as an UTSOIwafer or an ETSOI wafer having a BOX layer present between twosemiconductor layers. According to an exemplary embodiment, each of thesemiconductor layers comprises Si.

The BOX layer forms BOX layer 303 in substrate 302. According to thepresent teachings, at least a portion of BOX layer 303 is configured toact as a primary background oxygen getterer of the device, i.e., toattract any background oxygen present. Namely, at least a portion of BOXlayer 303 is configured to be Si-rich and/or is implanted with an oxygengetterer species such as one or more of As and B. According to theexemplary embodiment shown in FIG. 3, BOX layer 303 is configured, inits entirety, to be Si-rich, with an oxygen getterer species implantedinto region 306.

As the primary background oxygen getterer, BOX layer 303 serves toprevent regrowth of interfacial oxide layer 338 that separates gatestack 316 from substrate 302. The regrowth of the interfacial oxidelayer and its effect on device performance was described above.

Source/drain region 312 comprises a source/drain extension region 322that is continuous with a raised source/drain region 324 (havingsilicide region 326 formed on a top surface thereof). Each ofsource/drain extension regions 322 and raised source/drain region 324are doped. Suitable dopants will vary depending on whether MOSFET device300 is an NFET or a PFET device. By way of example only, when MOSFETdevice 300 is an NFET device, suitable dopants for each of source/drainextension region 322 and raised source/drain region 324 include, but arenot limited to, one or more of As, P and Sb. When MOSFET device 300 is aPFET device, suitable dopants for each of source/drain extension region322 and raised source/drain region 324 include, but are not limited to,one or more of B and BF₂. Source/drain region 314 comprises asource/drain extension region 328 that is continuous with a raisedsource/drain region 330 (having silicide region 332 formed on a topsurface thereof). As above, when MOSFET device 300 is an NFET device,suitable dopants for each of source/drain extension region 328 andraised source/drain region 330 include, but are not limited to, one ormore of As, P and Sb. When MOSFET device 300 is a PFET device, suitabledopants for each of source/drain extension region 328 and raisedsource/drain region 330 include, but are not limited to, one or more ofB and BF₂.

Well region 334 is present between source/drain region 312 andsource/drain region 314. Well region 334 serves as a channel of thedevice. According to an exemplary embodiment, MOSFET device 300 iseither an NFET or a PFET device and well region 334 comprises either ap-well implant (such as one or more of B, BF₂ and In) or an n-wellimplant (such as one or more of As, P and Sb), respectively. A haloregion 336 is present on either side of well region 334. When MOSFETdevice 300 is an NFET device, halo regions 336 can comprise one or moreof B and BF₂. When MOSFET device 300 is a PFET device, halo regions 336can comprise one or more of As, P and Sb.

Gate stack 316 comprises high-K layer 340 and metal gate layer 342 overhigh-K layer 340. High-K layer 340 can comprise one or more of HfO₂,Ta₂O₅, TiO₂, Al₂O₃ and La₂O₅. Metal gate layer 342 can comprise one ormore of Ta, TaN, TaCN, TaSiN, TaSi, AlN, W and Mo. Gate stack 316 is afully metal gate stack, i.e., does not contain a silicon layer. In theexemplary embodiment shown illustrated in FIG. 3, the overall thicknessof the gate stack is defined as a combined thickness of the high-K layerand the metal gate layer.

Metal gate layer 342 has a thickness that is greater than a thickness ofmetal gate layer 142 and metal gate layer 242, described, for example,in conjunction with the description of FIGS. 1 and 2, respectively,above. While having a thicker metal gate layer increases favorablestress and mobility and enhances drive current (see above), there can bethicknesses beyond which certain factors, such as parasitic capacitance,can become an issue. Thus, according to an exemplary embodiment, metalgate layer 342 has a thickness of between about 50 nm and about 100 nm.

As highlighted above, interfacial oxide layer 338 separates gate stack316 from substrate 302. According to an exemplary embodiment,interfacial oxide layer 338 comprises SiO₂. As above, BOX layer 303 isconfigured to prevent regrowth of interfacial oxide layer 338, and assuch is located closer to interfacial oxide layer 338 than inconventional devices.

As shown in FIG. 3, nitride spacers 318 are present adjacent to gatestack 316 and offset spacers 320 are present between nitride spacers 318and source/drain diffusion spacers 321. According to an exemplaryembodiment, offset spacers 320 comprise oxide spacers and source/draindiffusion spacers 321 comprise nitride spacers. Nitride spacers 318 andoffset spacers 320 are configured to have a combined thickness to setproper overlap capacitance for RTA-source/drain extension flow (seeabove description).

FIGS. 4A-M are cross-sectional diagrams illustrating exemplarymethodology 400 for fabricating a MOSFET device. As will be apparentfrom the following description, methodology 400 is directed tofabricating a metal-gated MOSFET device having the same gate stackconfiguration as MOSFET device 200, described, for example, inconjunction with the description of FIG. 2, above. However, since theMOSFET device configurations described above differ from one anotherbased primarily on the gate stack configuration of each device,methodology 400 is easily adaptable to fabricate MOSFET device 100and/or MOSFET device 300, described, for example, in conjunction withthe description of FIGS. 1 and 3, respectively, above.

In step 402, SOI wafer 440 is provided. According to an exemplaryembodiment, SOI wafer 440 comprises either an UTSOI substrate or anETSOI wafer having semiconductor layer 442, BOX layer 444 oversemiconductor layer 442 and semiconductor layer 446 over a side of BOXlayer 444 opposite semiconductor layer 442. According to an exemplaryembodiment, both semiconductor layers 442 and 446 comprise Si. Asdescribed above, SOI wafer 440 will serve as a substrate of the device.Further, if SOI wafer 440 comprises an UTSOI then semiconductor layer446 has a thickness of between about 13 nm and about 20 nm (as describedabove). If SOI wafer 440 comprises an ETSOI then semiconductor layer 446has a thickness of between about seven nm and about 10 nm (as describedabove).

According to an exemplary embodiment, an SOI wafer is provided with atop semiconductor layer having a thickness that is, e.g., greater than20 nm. The top semiconductor layer is then thinned using oxidation andwet etching (such as hydrofluoric (HF) acid etching) to the correctthickness for semiconductor layer 446. This thinning step is notnecessary if SOI wafer 440 can be provided with semiconductor layer 446having the proper thickness.

According to an exemplary embodiment, BOX layer 444 comprises SiO₂.Further, BOX layer 444 is configured to be Si-rich. Namely, Si isimplanted into BOX layer 444 rendering BOX layer 444 Si-rich.

In step 404, an oxide layer and a nitride layer are provided that willbe used during the formation of STI regions 453 and 455 (describedbelow). Namely, an oxide layer is deposited over semiconductor layer446. A nitride layer is then deposited over a side of the oxide layeropposite semiconductor layer 446. Lithography is used to pattern a maskover what will be the active area of the device, i.e., the area in whichdevice structures, such as source/drain regions, a channel and a gatestack, will be formed. Reactive ion etching (RIE) is then used to etchsemiconductor layer 446, the oxide layer and the nitride layer so as toform semiconductor layer 448, oxide layer 450 and nitride layer 452,respectively.

In step 406, an STI oxide is deposited followed by a densificationanneal. Chemical-mechanical planarization (CMP) is then performed toremove excess STI oxide, with nitride layer 452 acting as an etch stop.As such STI regions 453 and 455 are formed having a thickness equivalentto a combined thickness of semiconductor layer 448/oxide layer450/nitride layer 452.

In step 408, nitride layer 452 is removed. According to an exemplaryembodiment, nitride layer 452 is removed using hot phosphoric acid(H₃PO₄), i.e., at a temperature of greater than about 150 degreesCelsius (° C.). Oxide layer 450 serves to protect semiconductor layer448 during removal of nitride layer 452. Once nitride layer 452 has beenremoved, oxide layer 450 is then removed. According to an exemplaryembodiment, oxide layer 450 is removed using a wet etching process, suchas HF acid etching. The process of removing oxide layer 450 will alsofurther remove some of the STI oxide (deposited in step 406, above),thus reducing the thickness of the STI regions (i.e., forming STIregions 454 and 456).

At least one oxygen getterer species is implanted into at least aportion, e.g., portion 445, of BOX layer 444 (as shown illustrated byarrows 457). As described above, suitable oxygen getterer speciesinclude, but are not limited to, one or more of As and B. According toan exemplary embodiment, the oxygen getterer species implant, at a doseof between about 1×10¹⁸ atoms per cubic centimeter (atoms/cm³) and about10×10¹⁸ atoms/cm³, is peaked inside a top portion (i.e., portion 445) ofBOX layer 444. While the embodiment shown illustrated in FIGS. 4A-Mincludes a BOX layer that is both Si-rich and implanted with an oxygengetterer species, this is not the only BOX layer configuration that maybe implemented in the present techniques. For example, the BOX layer canbe configured to be Si-rich and not implanted with an oxygen gettererspecies. Conversely, the BOX layer can be implanted with an oxygengetterer species but not configured to be Si-rich.

In step 410, following the implantation of the oxygen getterer speciesinto the BOX layer, sacrificial oxide layer 458 is formed onsemiconductor layer 448. According to an exemplary embodiment,sacrificial oxide layer 458 is grown on semiconductor layer 448 usingthermal oxidation.

An implanted well region, i.e., well region 489, is then formed insemiconductor layer 448. Namely, lithography is used to pattern a resistmask over sacrificial oxide layer 458 with a footprint and location ofthe well region. When the device is an NFET device, p-well implants arethen introduced into semiconductor layer 448 in the well region.Suitable p-well implants include, but are not limited to, B, BF₂ and In.Following the implantation, the mask is removed. Similarly, when thedevice is a PFET device, n-well implants are introduced intosemiconductor layer 448 in the well region. Suitable n-well implantsinclude, but are not limited to, As, P and Sb. Following theimplantation, the mask is removed. The well region is then annealed.

In step 412, sacrificial oxide layer 458 (formed in step 410, describedabove) is removed, i.e., stripped, from semiconductor layer 448.According to an exemplary embodiment, sacrificial oxide layer 458 isstripped using a wet etch, such as HF acid etching. The process ofremoving sacrificial oxide layer 458 will also remove some more of theSTI oxide thus further reducing the thickness of the STI regions (i.e.,forming STI regions 466 and 468).

Interfacial oxide layer 462 is then formed over semiconductor layer 448.According to an exemplary embodiment, interfacial oxide layer 462comprises SiO₂ (as described above) and is grown over semiconductorlayer 448 using thermal oxidation. High-K layer 464 is then depositedover interfacial oxide layer 462. The high-K layer can comprise one ormore of HfO₂, Ta₂O₅, TiO₂, Al₂O₃ and La₂O₅ (as described above).

In step 414, metal gate layer 470 is deposited over STI regions 466 and468/high-K layer 464. As described above, the metal gate layer cancomprise one or more of Ta, TaN, TaCN, TaSiN, TaSi, AlN, W and Mo.Silicon layer 472 is then deposited over metal gate layer 470. Asdescribed above, the silicon layer can comprise one or more of amorphousSi or poly-Si. High-K layer 464, metal gate layer 470 and silicon layer472 will be used to form a gate stack of the device.

Metal gate layer 470 will have a thickness of between about 20 nm andabout 50 nm, and silicon layer 472 will have a thickness of betweenabout 50 nm and about 80 nm. See, for example, FIG. 2 (described above).However, as highlighted above, the thickness of the metal gate layerand/or the silicon layer can be varied. For example, the metal gatelayer can be configured to have a thickness of about 10 nm, and thesilicon layer can be configured to have a thickness of between about 40nm and about 90 nm. See, for example, FIG. 1 (described above).Alternatively, the gate stack can be a fully metal gate stack, i.e.,does not contain a silicon layer, and the metal gate layer can beconfigured to have a thickness of between about 50 nm and about 100 nm.See, for example, FIG. 3 (described above).

Screen oxide layer 474 is formed over silicon layer 472. According to anexemplary embodiment, screen oxide layer 474 comprises oxidized silicon,e.g., oxidized poly-Si when silicon layer 472 comprises poly-Si, and isformed using either a chemical oxidation, an ozone or a thermal process.Screen oxide layer 474, which can have a thickness of between aboutthree nm and about five nm, serves to trap and thus prevent metalcontaminants from getting into the gate stack during the followingdoping of silicon layer 472. For example, since heavy metal atoms have amuch shorter implant range than the dopants, the heavy metal atoms endup in the screen oxide layer and can be removed. Further, the screenoxide layer serves to randomize (scatter) the ion species (dopants)implanted into the gate stack, so that ion channeling does not occurthrough silicon layer 472.

Silicon layer 472 is then doped. This step is a gate stack doping step.Namely, lithography is used to pattern a resist mask with the footprintand location of the gate stack over silicon layer 472. When the deviceis an NFET device, a dopant(s), such as one or more of As, P and Sb isthen introduced into silicon layer 472. Following the doping, the maskis removed. Similarly, when the device is a PFET device, a dopant(s),such as one or more of B and BF₂ is introduced into silicon layer 472.Following the doping, the mask is removed. It is notable that when thegate stack is a fully metal gate stack and does not contain a siliconlayer, this doping step is not performed.

In step 416, nitride gate cap 476 is deposited over screen oxide layer474. According to an exemplary embodiment, nitride gate cap 476comprises silicon nitride (SiN). Nitride gate cap 476 will be used toshield the gate stack during selective raised source/drain epitaxy (seebelow).

In step 418, the gate stack is defined. Namely, lithography is used topattern a resist mask with the footprint and location of the gate stackover nitride gate cap 476. RIE, or any other suitable etching process,is then used to define the gate stack. Specifically, interfacial oxidelayer 462/high-K layer 464/metal gate layer 470/silicon layer 472/screenoxide layer 474/nitride gate cap 476 are etched to form interfacialoxide layer 462 a/high-K layer 464 a/metal gate layer 470 a/siliconlayer 472 a/screen oxide layer 474 a/nitride gate cap 476 a,respectively.

In step 420, a nitride layer is deposited over the device andnitride-selective RIE is used to form nitride disposable spacers 480. Instep 422, an epitaxial pre-clean is used to clean portions ofsemiconductor layer 448 that will be used for selective raisedsource/drain epitaxy (see below). Suitable epitaxial pre-cleans include,but are not limited to, a wet HF acid etching process followed by a bakein hydrogen at around 800° C. to eliminate all oxygen from the surface,i.e., of semiconductor layer 448, prior to epitaxy growth.

Following the epitaxial pre-cleaning step, epitaxy is used toselectively form raised source/drain regions 482 and 484 extending abovesemiconductor layer 448 adjacent to opposite sides of the gate stack.

In step 424, screen oxide layer 486 is formed over each of raisedsource/drain regions 482 and 484. According to an exemplary embodiment,screen oxide layer 486 comprises SiO₂ and is formed over the raisedsource/drain regions using either a chemical oxidation, an ozone or athermal process. Dopants are then implanted into raised source/drainregions 482 and 484. Namely, lithography is used to pattern a resistmask over all but the raised source/drain regions. When the device is anNFET device, a deep source/drain implant(s), such as one or more of As,P and Sb is then introduced into source/drain regions 482 and 484.Following the implantation, the mask is removed. Similarly, when thedevice is a PFET device, a deep source/drain implant(s), such as one ormore of B and BF₂ is introduced into source/drain regions 482 and 484.Following the implantation, the mask is removed. As will be describedbelow, source/drain extension regions will be formed to extend theraised source/drain regions to the well region.

In step 426, nitride disposable spacers 480 and nitride gate cap 476 aare removed, e.g., using hot H₃PO₄. Nitride spacers 491 are applied inplace of nitride disposable spacers 480 adjacent to the gate stack.

Offset spacers are then formed adjacent to nitride spacers 491/oversemiconductor layer 448. The offset spacers comprise oxide spacers (asdescribed above) and can be formed by depositing an oxide layer over thedevice and using oxide-selective RIE to form offset spacers 492. A RTAprocess, such as spike RTA, is then used to both activate and diffusethe gate doping, if present, as well as the deep source/drain implants.

In step 428, halo and source/drain extension regions of the device areformed. Namely, lithography is used to pattern a resist mask selectivelycovering the raised source/drain regions of the device and the gatestack. According to the exemplary embodiment described below, the sameresist mask(s) is used for both the halo implants and the source/drainextension implants. Alternatively, one resist mask can be used for thehalo implants, and another resist mask can be used for the source/drainextension implants. When the device is an NFET device, a haloimplant(s), such as one or more of B and BF₂, is introduced into thewell region forming halo regions 493. A source/drain extensionimplant(s), such as one or more of As, P and Sb, is introduced betweenthe raised source/drain regions and the well region, formingsource/drain extension regions 494 and 495 that extend the raisedsource/drain regions to the well region. Following the implantation, themask is removed. Similarly, when the device is a PFET device, a haloimplant(s), such as one or more of As, P and Sb, is introduced into thewell region forming halo regions 493. A source/drain extensionimplant(s), such as one or more of B and BF₂, is introduced between theraised source/drain regions and the well region, forming source/drainextension regions 494 and 495 adjacent to halo regions 493 that extendthe raised source/drain regions to the well region. Following theimplantation, the mask is removed.

In step 430, screen oxide layer 474 a is removed and replaced with oxideliner 494. Oxide liner 494 will protect silicon layer 472 a during thefollowing source/drain diffusion spacer formation. Screen oxide layer486 is also removed and replaced with offset spacers 496. Offset spacers496 can comprise oxide spacers (as described above). Removing screenoxide layers 474 a and 486 serves to remove any metallic contaminantsthat may have been trapped by these layers during the implantation stepsdescribed above.

Source/drain diffusion spacers 495 are formed adjacent to offset spacers492. As described above, source/drain diffusion spacers 495 can comprisenitride spacers. According to an exemplary embodiment, source/draindiffusion spacers 495 are formed by first depositing a nitride layerover the device and then using nitride-selective RIE to formsource/drain diffusion spacers 495 adjacent to offset spacers 492/over aportion of offset spacers 496.

An anneal process is then used to activate the halo and source/drainextension implants. Suitable anneal processes include, but are notlimited to, RTA processes, such as spike RTA, laser RTA and/or flashRTA. RTA will serve to activate the halo and source/drain extensionimplants without diffusing the implants into the BOX layer, and willminimize regrowth of the interfacial oxide layer.

In step 432, silicide regions are formed over the raised source/drainregions and the gate stack silicon layer. Namely, a silicidepre-cleaning process is performed, followed by deposition of a metalover the raised source/drain regions and over silicon layer 472 a.Suitable silicide metals include, but are not limited, nickel (Ni) andcobalt (Co). A silicide-forming anneal is then performed to formsilicide regions 497, 498 and 499. Any excess metal can be removed,e.g., using CMP.

Although illustrative embodiments of the present invention have beendescribed herein, it is to be understood that the invention is notlimited to those precise embodiments, and that various other changes andmodifications may be made by one skilled in the art without departingfrom the scope of the invention.

1. A metal-oxide semiconductor device comprising: a substrate having aburied oxide layer, wherein the buried oxide layer is configured, in itsentirety, to be silicon-rich, and wherein the buried oxide layer isimplanted with one or more oxygen getterer species such that the oxygengetterer species implant is peaked inside a top portion of the buriedoxide layer; a gate stack separated from the substrate by an interfacialoxide layer, the gate stack comprising: a high-K layer over theinterfacial oxide layer; and a metal gate layer over the high-K layer.2. The device of claim 1, wherein the substrate comprises either anultra-thin silicon-on-insulator substrate or an extra-thinsilicon-on-insulator substrate.
 3. The device of claim 1, wherein theoxygen getterer species comprise at least one of arsenic and boron. 4.The device of claim 1, wherein the gate stack further comprises asilicon layer over a side of the metal gate layer opposite the high-Klayer.
 5. The device of claim 4, wherein the silicon layer comprises oneor more of amorphous silicon and polysilicon.
 6. The device of claim 4,wherein the silicon layer has a thickness of between about 40 nanometersand about 90 nanometers.
 7. The device of claim 4, wherein the siliconlayer has a thickness of between about 50 nanometers and about 80nanometers.
 8. The device of claim 4, further comprising a silicideregion formed on the silicon layer.
 9. The device of claim 1, whereinthe metal gate layer has a thickness of about 10 nanometers.
 10. Thedevice of claim 1, wherein the metal gate layer has a thickness ofbetween about 20 nanometers and about 50 nanometers.
 11. The device ofclaim 1, wherein the metal gate layer has a thickness of between about50 nanometers and about 100 nanometers.
 12. The device of claim 1,wherein the substrate further comprises: a first raised source/drainregion; a second raised source/drain region; and a well region betweenthe first raised source drain region and the second raised source/drainregion.
 13. The device of claim 12, further comprising: a silicideregion formed on the first raised source/drain region; and a silicideregion formed on the second raised source/drain region.
 14. The deviceof claim 1, further comprising: nitride spacers adjacent to oppositesides of the gate stack; source/drain diffusion spacers; and offsetspacers between the nitride spacers and the source/drain diffusionspacers.